Effect of Nitridation of Silicon Dioxide on Its Infrared Spectrum-Reference-Cited by-同舟云学术

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Effect of Nitridation of Silicon Dioxide on Its Infrared Spectrum

Published:1984-03-01 Issue:3 Volume:131 Page:637-640
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Naiman M. L.¹²,Kirk C. T.¹²,Aucoin R. J.¹²,Terry F. L.¹²,Wyatt P. W.¹²,Senturia S. D.¹²

Affiliation:

1. MIT Lincoln Laboratory, Lexington, Massachusetts 02173

2. MIT, Cambridge, Massachusetts 02139

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2115648/pdf

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