Author:
Wang Liangyong,Song Zhitang,Liu Weili,Liu Bo,Zhong Min,He Aodong,Feng Songlin
Publisher
The Electrochemical Society
Cited by
3 articles.
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1. CMP for phase change materials;Advances in Chemical Mechanical Planarization (CMP);2022
2. CMP for phase change materials;Advances in Chemical Mechanical Planarization (CMP);2016
3. Effect of the Hydrogen Peroxide on the Ti0.4Sb2Te3Chemical Mechanical Polishing in Acidic Slurry;ECS Journal of Solid State Science and Technology;2014