A Concept for a Toolbox of Components for Modular Magnetic Microsensors

Abstract

Magnetic micro sensors are capable of covering a range of functions, for instance measurement of distance, force, or material properties like magnetic behavior or surface defects. By coming up with a toolbox of sensor components for the basic functions and considering their technology compatibility, a modular micro sensor family has been created. Combining the appropriate building blocks allows to achieving the sensor function desired. To demonstrate the approach, components to facilitate a micro strain gauge sensor for force measurement and a sensor allowing to analyzing magnetic material properties were created and used to build up the respective micro sensors.