Process Parameter Control for the Formation of Porous Silicon through Nanoporous Alumina Using Pulsed Anodization

Abstract

This paper discusses the formation of porous silicon through porous alumina using pulsed anodization for various parameters of anodization, type of acid for the formation of porous alumina, and their characterization using photoluminescence. The porous alumina has been synthesized using sulfuric, oxalic and phosphoric acids and luminescent porous silicon through the porous alumina has been obtained in each case. The porous silicon through porous alumina formation has also been investigated using pulsed anodization. The duty cycle and frequency of the square wave pulse have been varied and the optical properties of the porous silicon, so formed, through the porous alumina, have been investigated.