Batch Reactor Kinetic Studies of Tungsten LPCVD from Silane and Tungsten Hexafluoride-Reference-Cited by-同舟云学术

Batch Reactor Kinetic Studies of Tungsten LPCVD from Silane and Tungsten Hexafluoride

Published:1996-01-01 Issue:1 Volume:143 Page:296-302
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Bell David A.¹²,McConica Carol M.¹²,Baker Kevin L.¹²,Kuchta Elizabeth¹²

Affiliation:

1. Department of Chemical and Bioresource Engineering, Colorado State University, Fort Collins, Colorado 80523

2. Institute of Physics, Technical University of Wroclaw, 50‐370 Wroclaw, Poland

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1836426/pdf

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