Electrolyzed Sulfuric Acid Application in Semiconductor Cleaning Processes: An Advanced Substitution of SPM Cleaning-Reference-Cited by-同舟云学术

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Electrolyzed Sulfuric Acid Application in Semiconductor Cleaning Processes: An Advanced Substitution of SPM Cleaning

Published:2017-04-26 Issue:5 Volume:77 Page:207-212
ISSN:1938-6737
Container-title:ECS Transactions
language:en
Short-container-title:ECS Trans.

Author:

Ahn Jin-hyun,Kim Pyung Dae,Hwang Seong Cheol,Seo Jinyoung,Lee Sungjin,Ogawa Yuichi,Ida Junichi,Sasaki Yuya,Nagai Tatsuo,Otsu Toru

Publisher

The Electrochemical Society

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Assessment of the Possibility of Hydrometallurgical Processing of Low-Grade Ores in the Oxidation Zone of the Malmyzh Cu-Au Porphyry Deposit;Minerals;2021-01-12

2. Environmentally Friendly Plating Pretreatment for ABS Plastic Using Electrolyzed Sulfuric Acid;Transactions of the Materials Research Society of Japan;2018-12-01

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