A Tunable Color Filter Using Sub-Micron Grating Integrated with Electrostatic Actuator Mechanism

Abstract

We propose a NEMS (Nano Electro Mechanical Systems) tunable color filter using sub-micron grating, which can modulate the reflected light by changing the period of the sub-micron grating pixel by means of electrostatic actuation. The NEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The sub-micron grating was made in a top layer of an SOI (Silicon on Insulator) wafer. The tiny anchors were covered by parylene N during the sacrificial release process using buffered hydrofluoric acid. The color tuning from yellow to green was demonstrated at 20 V operation.