Author:
Lee Donovan,Tran Helen,King Liu Tsu-Jae
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference16 articles.
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2. ALD Refill of Nanometer-Scale Gaps with High-κ Dielectric for Advanced CMOS Technologies
3. Nanogap Capacitors for Label Free DNA Analysis
Cited by
1 articles.
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