Author:
Chen S. Y.,Chen H. W.,Chen C. H.,Chiu F. C.,Liu C. H.,Hsieh Z. Y.,Huang H. S.,Hwang H. L.
Abstract
Metal-oxide-semiconductor capacitors (MOSCs) and Metal-oxide-semiconductor field-effect transistors (MOSFETs) incorporating hafnium dioxide (HfO2) dielectrics were fabricated and investi-gated. The electrical and interfacial properties were characterized including C-V, IDS-VGS, the mean density of interface traps per unit area and energy (), energy of interface traps density distribution, interface traps density (Nit), density of near-interface oxide traps per unit area (NNIOT), effective capture cross-section area (σs), mi-nority carrier lifetime (τFIJ) and surface recombination velocity (so) were studied. Furthermore, a comparison with MOSFETs using conventional SiO2 as gate dielectrics was also made.
Publisher
The Electrochemical Society
Cited by
2 articles.
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