Towards Very High Voltage SiC Power Devices

Abstract

The development of high voltage devices is a great challenge. At least, railway and high voltage distribution network are example of applications requiring high voltage devices. SiC power devices and technology seems to be mature enough to give a short term solution. Indeed, silicon carbide devices appear to be the semiconductor of choice for high voltage (> 6.5 kV) applications compared to Gallium Nitride and Diamond. For high voltage devices, periphery protection is mandatory in order to reduce the well-known electric field crowding taking place at the junction edge. Some details are given about the different periphery technics (JTE, guard rings, MESA) applied to SiC devices, before combining some of them to reach higher and higher breakdown voltages. Some works remaining to be done are given as a conclusion of this paper.