Affiliation:
1. GEC Research Laboratories, Hirst Research Centre, Wembley, England HA9 7PP
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Crystal Growth in Silicon Chemical Vapor Deposition from Silane: The Role of Hydrogen;Journal of The Electrochemical Society;1997-06-01
2. References;Thin Films by Chemical Vapour Deposition;1990
3. Solid Phase Epitaxy of LPCVD Amorphous Silicon Films;Journal of The Electrochemical Society;1987-10-01
4. Submicron highly doped Si layers grown by LPVPE;Journal of Crystal Growth;1986-07
5. SILICON VAPOR-PHASE EPITAXY;Epitaxial Silicon Technology;1986