Author:
Liu Po-Tsun,Chang T. C.,Yan Shuo-Ting,Li Chun-Huai,Sze S. M.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
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5. Improvement in Integration Issues for Organic Low-k Hybrid-Organic-Siloxane-Polymer
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