Characterization of Thin Film Molybdenum Silicide Oxide

Author:

Mochizuki T.1,Kashiwagi M.1

Affiliation:

1. NEC‐Toshiba Information Systems Incorporated, 72, Horikawa‐cho, Saiwai‐ku, Kawasaki, Japan 210

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

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