High Breakdown Voltage Enhancement-Mode MgxZn1-xO Thin-Film Transistor Using CF4 Plasma Treatment

Author:

Chiu H.-C.,Wang H.-C.,Lin C.-K.,Kao H.-L.,Fu J. S.,Hsueh K.-P.

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering

Reference9 articles.

1. W. Saito, I. Omura, T. Domon, and K. Tsuda , IEEE Proc. Compound Semiconductor IC Symp. , 253 (2006).

2. M. L3ito and T. Ogura , Proc. Int. Power Electron Conference , 1184 (2005).

3. Two dimensional electron gases in polycrystalline MgZnO/ZnO heterostructures grown by rf-sputtering process

4. Correlation between photoluminescence and oxygen vacancies in ZnO phosphors

5. High-performance enhancement-mode AlGaN/GaN HEMTs using fluoride-based plasma treatment

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