(Invited) The Thermal Budget of Hydrogen-Related Donor Profiles: Diffusion-Limited Activation and Thermal Dissociation
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Published:2013-03-15
Issue:5
Volume:50
Page:161-175
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Laven Johannes G.,Job Reinhart,Schulze Hans-Joachim,Niedernostheide Franz-Josef,Schustereder Werner,Frey Lothar
Abstract
The impact of the thermal budget on hydrogen-related donor profiles in high purity silicon implanted with protons in the MeV energy range is investigated. The appearance of donor profiles is limited to the annealing temperature between 350 {degree sign}C and 500 {degree sign}C. The activation of doping profiles is limited by the diffusion of implanted hydrogen from the end-of-range region throughout the radiation-induced damage. This formation process of profiles is described by a diffusion model with an effective activation energy of 1.2 eV. The hydrogen-related donors are radiation-induced defect complexes decorated by hydrogen. The thermal stability of these donors is limited by dissociation. The deactivation of the doping is modeled by two hydrogen-related donor species with effective dissociation energies of 2.5 eV and 3 eV. The described formation and dissociation mechanisms define upper and lower limits of the post-implantation thermal budget, respectively, for sensible use of proton implantation doping in crystalline Silicon.
Publisher
The Electrochemical Society
Cited by
1 articles.
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