Fabrication of Ideally Ordered Anodic Porous Alumina on Glass Substrates by Stamping Process Using Flexible Stamps

Abstract

Establishing a process to fabricate anodic porous alumina with an ordered array of uniform-sized pores on a substrate is an important challenge of fabricating various functional devices. In this study, ordered anodic porous alumina was fabricated on glass substrates by a stamping process using a flexible stamp. This process enables the formation of a resist mask at a low pressure on the sample surface to pattern the starting point for pore generation during anodization. Therefore, it is possible to pattern samples without breaking the glass substrate, and subsequent anodization can generate ordered anodic porous alumina on the substrate. The stamping process using flexible stamps can be applied regardless of the roughness of the Al film on a substrate because the stamp deforms according to the Al surface shape, even when there is a protruding structure on the Al surface. In addition, it was shown that this process could be used to form ordered anodic porous alumina even on Al surfaces with three-dimensional curvatures, such as convex lenses.