Author:
Dalmau Rafael,Moody Baxter,Schlesser Raoul,Mita Seiji,Xie Jinqiao,Feneberg Martin,Neuschl Benjamin,Thonke Klaus,Collazo Ramón,Rice Anthony,Tweedie James,Sitar Zlatko
Abstract
AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfaces.
Publisher
The Electrochemical Society
Cited by
7 articles.
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