Affiliation:
1. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
77 articles.
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3. THERMAL OXIDATION OF SILICON AND Si-SiO2 INTERFACE MORPHOLOGY, STRUCTURE AND LOCALIZED STATES;Handbook of Surfaces and Interfaces of Materials;2001
4. Oxidation of Silicon in Ultradry Ozone;Denki Kagaku oyobi Kogyo Butsuri Kagaku;1995-06-05
5. Thermal Oxidation and Nitridation;Fundamentals of Semiconductor Processing Technology;1995