Author:
Samb Mamadou Lamine,Dong HanPeng,Jacques Emmanuel,Sissoko Gregoire,Seidou Maiga Ahmadou,Mohammed-Brahim Tayeb
Abstract
The effect of thinning the active layer of TFTs on their performance is studied. Experimentally, through the study of microcrystalline silicon TFTs, the beneficial effect of thinning the active layer is highlighted through the behavior of the subthreshold slope and of the off-current. Simulation results, using Silvaco tools, show that the beneficial effect is mainly due to the high increase of the lateral electrical field between source, channel and drain
Publisher
The Electrochemical Society
Cited by
1 articles.
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