Affiliation:
1. U.S. Army Electronics Technology and Devices Laboratory (ERADCOM), Fort Monmouth, New Jersey 07703
2. Department of Chemistry, University of Alabama, University, Alabama 35486
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
16 articles.
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1. Thermal degradation of polymethacrylonitrile;Polymer Degradation and Stability;1993-01
2. Application of electron beam irradiation in microlithography;International Journal of Radiation Applications and Instrumentation. Part C. Radiation Physics and Chemistry;1991-01
3. Polymethacrylonitrile as a resist in x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-01
4. Positive Radiation Resists;Semiconductor Lithography;1988
5. A Cross‐Linked Positive Resist Derived from Poly(Methacrylonitrile‐co‐Methacrylic Acid);Journal of The Electrochemical Society;1985-06-01