Cu CVD from Copper(II) Hexafluoroacetylacetonate: II . Laser‐Assisted Selective Area Deposition-Reference-Cited by-同舟云学术

Cu CVD from Copper(II) Hexafluoroacetylacetonate: II . Laser‐Assisted Selective Area Deposition

Published:1995-11-01 Issue:11 Volume:142 Page:3911-3918
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Chen Y. D.¹,Reisman A.²,Turlik I.¹²³⁴,Temple D.¹²³⁴

Affiliation:

1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA

2. Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA

3. Department of Electrical Engineering, University of North Carolina at Charlotte, Charlotte, North Carolina 28223, USA

4. MCNC, Electronic Technologies Division, Research Triangle Park, North Carolina 27709‐2889, USA

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2048433/pdf

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