Non-Visual Defect Monitoring with Surface Voltage Mapping-Reference-Cited by-同舟云学术

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Non-Visual Defect Monitoring with Surface Voltage Mapping

Published:2015-12-30 Issue:4 Volume:5 Page:P3087-P3095
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Findlay Andrew,Marinskiy Dmitriy,Edelman Piotr,Wilson Marshall,Savtchouk Alexandre,Lagowski Jacek

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference29 articles.

1. A Novel Method For Studying Degradation Related To Plasma Processing Of Silicon Wafers

2. Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring

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