Nitrogenated Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Deposited on Titanium Substrates by Pulsed Laser Deposition

Abstract

Nitrogenated ultrananocrystalline diamond/nonhydrogenated amorphous carbon composite (UNCD/a-C) films were deposited on titanium in a nitrogen atmosphere by laser pulsed deposition. The adhesion between the films and titanium substrates were remarkably improved as compared with those between hydrogenated (UNCD/a-C) films and titanium substrates. X-ray photoemission and near edge X-ray absorption structure measurements indicated an increase in the sp2 and sp bonding fraction such as C=N double and triple bonds by nitrogenation. Since they locally disconnect tetrahedral bonding in the films and expected to release an internal stress in the films, the film adhesion might be improved.