Rapid Annealing of Tungsten Polycide Films Using Halogen Lamps-Reference-Cited by-同舟云学术

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Rapid Annealing of Tungsten Polycide Films Using Halogen Lamps

Published:1986-04-01 Issue:4 Volume:133 Page:794-798
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Kato J.¹²³,Asahina M.¹²³,Shimura H.¹²³,Yamamoto Y.¹²³

Affiliation:

1. Seiko Epson Corporation, Fujimi Plant, 281 Fujimi, Fujimi‐Machi, Suwa‐Gun, Nagano, Japan

2. Seiko Epson Corporation, Research and Development Department, 3‐3‐5 Owa Suwa‐Shi Nagano, Japan

3. Research Center of Ion Beam Technology, Hosei University, Kajino‐Cho, Koganei‐Shi, Tokyo, 184 Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2108679/pdf

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