Effect of Composition Ratio on Erbium Silicide Work Function on Different Morphology of Si(100) Surface Changed by Alkaline Etching
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Published:2014-03-26
Issue:3
Volume:61
Page:47-53
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Tanaka Hiroaki,Suwa Tomoyuki,Teramoto Akinobu,Motoya Tsukasa,Sugawa Shigetoshi,Ohmi Tadahiro
Abstract
Electrical and physical properties of ErSix on n-type Si(100) surfaces with an alkaline solution etching are investigated. The (111) facet of Si surface affects the SBH between ErSix and n-type Si, because the SBH depends on the surface orientation of Si. A controlling the facet of orientation is a key parameter for a reducing contact resistance for high performance MISFETs. These silicidation reactions are very important to develop the high current drivability devices.
Publisher
The Electrochemical Society