Abstract
To power the next generation of miniaturized electronic devices, the energy storage capability of Li-ion micro-batteries has to be significantly improved and the fabrication of high performance 3D electrodes is mandatory. Here we show how to carefully match the design of efficient 3D scaffold based on metallic porous template with the deposition parameters of titanium dioxide films made from thermal Atomic Layer Deposition method for designing efficient 3D electrodes for Li-ion micro-batteries. A 3D electrode made from Pt porous scaffold coated with 150 nm-thick anatase TiO2 film reaches a high surface capacity value up to 1600 μAh.cm−2 at C/12 with a good cycling stability during 100 cycles.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. Challenges and prospects of 3D micro-supercapacitors for powering the internet of things;Lethien;Energy Environ. Sci.,2019
2. Review—power sources for the internet of things;Raj;J. Electrochem. Soc.,2018
3. A cubic-millimeter energy-autonomous wireless intraocular pressure monitor;Chen,2011
4. Atomic layer deposition of titanium nitride from TDMAT precursor;Musschoot;Microelectron. Eng.,2009
5. Growth of platinum films by atomic layer deposition (ALD);Fang;White Pap. - Oxfor Instruments,2009
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