Author:
Jezewski Christopher,Wiegand Christopher J.,Ye Dexian,Mallikarjunan Anupama,Liu Deli,Jin Chowming,Lanford William A.,Wang Gwo-Ching,Senkevich Jay J.,Lu Toh-Ming
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Multilevel interconnections for ULSI and GSI era
2. The National Technology Roadmap for Semiconductors, 2001 ed., Semiconductor Industry Association, Santa Clara, CA (2001).
3. M. E. Thomas, D. M. Smith, S. Wallace, and Nancy Iwamoto, inProceedings of the International Interconnect Technology Conference (IITC), p. 223 (2002).
4. W. F. A. Bresling, A. Satta, J. Schumacher, T. Abell, V. Sutcliffe, A.-M. Hoyas, G. Beyer, D. Gravesteijn, and K. Maex, inProceedings of the International Interconnect Technology Conference (IITC), p. 288 (2002).
5. W. F. A. Bresling, A. Satta, J. Schumacher, A. M. G. Beyer, K. Maex, O. Kilpella, and H. Sprey, inProceedings of 3rd International Conferences on Microelectronics and Interfaces, American Vacuum Society (AVS), p. 52 (2002).
Cited by
23 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献