Shape Formation Analysis of Silicon Nanopore Fabricated by Anisotropic Wet Etching Method-Reference-Cited by-同舟云学术

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Shape Formation Analysis of Silicon Nanopore Fabricated by Anisotropic Wet Etching Method

Published:2017 Issue:12 Volume:6 Page:P760-P764
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Wang Yifan,Chen Qi,Deng Tao,Liu Zewen

Funder

National Natural Science Foundation of China (NSFC)

Beijing National Science Foundation

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference42 articles.

1. Nanopore sensors for nucleic acid analysis

2. DNA Translocation through Graphene Nanopores

3. Selective Multidetection Using Nanopores

4. Single-molecule spectroscopy of amino acids and peptides by recognition tunnelling

5. High-Bandwidth Protein Analysis Using Solid-State Nanopores

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method;Microsystems & Nanoengineering;2023-05-16

2. Fabrication of Plasmonic Optical Nanopore Platform for Single Molecule Sensing;Journal of The Electrochemical Society;2020-01-02

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