Synthesis of Transparent ZrO2 Thin Films by MOCVD

Abstract

ZrO2 films on glass and quartz substrates were synthesized by metalorganic chemical vapour deposition (MOCVD) using zirconium acetylacetonate (Zr(acac)4) as precursor. The reactive and carrier gases were oxygen and argon, respectively. Structural and morphological characterizations were studied by XRD, SEM and AFM. Naked-eye transparent films of cubic ZrO2 phase were obtained, with crystallite size ranging from 10 - 17 nm. Apparently, the films grow in a columnar structure and there is not contamination by carbon atoms. The film mean roughness is low, ranging from 0.674 to 1.33 nm. The films are forming of particles which sizes are ranging from 0.2 to 1.0 µm for the films grown at 700 ºC and from 0.1 to 0.5 µm for the films grown at 500 ºC.