Author:
de Rouffignac Philippe,Li Zhengwen,Gordon Roy G.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference14 articles.
1. International Technology Roadmap for Semiconductors, 2003 ed.
2. Low dielectric constant materials for microelectronics
3. Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
4. Determination of Young’s Modulus of Porous Low-k Films by Ellipsometric Porosimetry
5. W. Besling, A. Satta, J. Schuhmacher, T. Abell, V. Sutcliffe, A. M. Hoyas, G. Beyer, D. Gravesteijn, and K. Maex, in
Proceedings of the International Interconnect Technology Conference
, IEEE, p. 288 (2002).
Cited by
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