1. See, for example,Modern GaAs Processing Methods, R. Williams, Artech House. Norwood, MA (1990).
2. See, for example, P. M. Asbeck, inHigh-Speed Semiconductor Devices, S. M. Sze, Editor, Chap. 6, John Wiley & Sons, Inc, New York (1990).
3. See, for example, S. J. Pearton and N. J. Shah, inHigh-Speed Semiconductor Devices, S. M. Sze, Editor, Chap. 5, John Wiley & Sons, Inc, New York (1990).
4. A Highly Selective, Chlorofluorocarbon‐Free GaAs on AlGaAs Etch
5. Selective Dry Etching of AlGaAs-GaAs Heterojunction