A Novel Cleaning Approach to Remove the Carbon Contaminant from Ru Surface of EUV Mask
-
Published:2017-08-15
Issue:2
Volume:80
Page:119-127
-
ISSN:1938-6737
-
Container-title:ECS Transactions
-
language:en
-
Short-container-title:ECS Trans.
Author:
Kim Min-Su,Song Hee-Jin,Kim Hyun-Tae,Park Jin-Goo
Publisher
The Electrochemical Society