Affiliation:
1. IMEC, B‐3001 Leuven, Belgium
2. GEC Marconi Materials Technology Limited, Northamptonshire, NN12 8EQ, England
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Silicon, Local Oxidation of (LOCOS);Reference Module in Materials Science and Materials Engineering;2016
2. Silicon, Local Oxidation of (LOCOS);Encyclopedia of Materials: Science and Technology;2001
3. Stress measurements in Si microelectronics devices using Raman spectroscopy;Journal of Raman Spectroscopy;1999-10
4. Fowler-Nordheim and hot-carrier stress study of latent plasma charging damage in various 50 Å gate dielectrics;2000 5th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.00TH8479)