3C-SiC on Si: A Biocompatible Material for Advanced Bioelectronic Devices

Abstract

Silicon carbide (SiC) has long been known as a robust semiconductor with superior properties to silicon for electronic applications. The cubic form of SiC, known as 3C-SiC, has been researched for non-electronic applications, such as MEMS and biosensors. In particular, our group has demonstrated that 3C-SiC is one of the few semiconductor materials that possesses both bio- and hemacompatibility, thus opening up a plethora of applications for this material. We have pioneered several biomedical devices using 3C-SiC grown on Si substrates, and recently have been investigating the use of this novel material for both continuous glucose monitoring and neural prosthetic applications. We will review nearly a decade of activity in this regard, with particular emphasis on the most promising applications: in vivo continuous glucose monitoring and biomedical implants for connecting the human nervous system to advanced prosthetics.