Online Control by IR Pyrometry of Nanostructured Multilayer CrCx/CrN Coatings Grown by MOCVD
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Published:2009-09-25
Issue:8
Volume:25
Page:273-280
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Douard Aurelia,Samelor Diane,Delclos Sophie,Tendero Claire,Maury Francis
Abstract
Online control of a deposition process is an important issue since it permits to check that everything is going well and it can contribute to elucidate the growth mechanism of the film. Results concerning real time analysis by IR pyrometry during CVD of nanostructured multilayer CrCx/CrN coatings are presented. The temporal variation of the emitted signal depends on the optical properties of the deposited material. In the case of CrCx coating, the emissivity behaves as for metal-like material: the resulting pyrometric signal changes sharply before stabilizing. With CrN, damped oscillations due to interferences resulting from multi reflection at interfaces are observed in the early stages. The signal recorded during deposition of CrCx/CrN multilayer coating is the combination between the two precedent phenomena: it perfectly follows the multilayer stacking as shown by comparison with TEM and SIMS profile analyses.
Publisher
The Electrochemical Society
Cited by
1 articles.
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