Formation of Dendrite-Like Defect during PR-Mask Silicon Oxide Wet Etching Process and Its Removal Method
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Published:2013-08-13
Issue:11
Volume:2
Page:P97-P100
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ISSN:2162-8742
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Container-title:ECS Solid State Letters
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language:en
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Short-container-title:ECS Solid State Letters
Author:
Song M.-G.,Yoon B. U.,Lee K.-T.,Choi S.-Y.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials