Performance Impact of Monolayer Coating of Polysilicon Micromotors-Reference-Cited by-同舟云学术

Performance Impact of Monolayer Coating of Polysilicon Micromotors

Published:1995-04-01 Issue:4 Volume:142 Page:1278-1285
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Deng Keren¹,Collins Rochael J.²,Mehregany Mehran¹,Sukenik Chaim N.²

Affiliation:

1. Electronics Design Center, Department of Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, Ohio 44106

2. Electronics Design Center, Department of Chemistry, Case Western Reserve University, Cleveland, Ohio 44106

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2044164/pdf

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