(Invited) Defect Generation Mechanism and Its Impact on Reliability Properties in MONOS Devices

Abstract

The interface-state generation mechanism and its impact on reliability properties, such as endurance and data retention, in MONOS devices have been studied. The charge measurement technique we developed has demonstrated that holes injected during erasing are the main cause of interface-state generation. From carrier separation measurement for MONOS devices, we have found the data retention degradation after P/E stress is owing to the increased hole injection from Si substrate via the generated interface states. We also discuss the physical origin of the interface states in MONOS devices and report on MONOS-specific interface-state generation/recovery phenomena, and their significant impact on endurance and retention properties.