Affiliation:
1. Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Tokai, Ibaraki 319‐11, Japan
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
24 articles.
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1. Defect-Selective Etching of Semiconductors;Springer Handbook of Crystal Growth;2010
2. Cathodoluminescence microscopy and spectroscopy of GaN epilayers microstructured using surface charge lithography;Journal of Applied Physics;2006-07-15
3. Photoelectrochemical Etching;Encyclopedia of Electrochemistry;2002-01-29
4. Wet etching of III–V semiconductors;Handbook of Advanced Electronic and Photonic Materials and Devices;2001
5. Chapter 6 Wet etching of III–V semiconductors;Processing and Properties of Compound Semiconductors;2001