Measurement of the negative ions temperature in the hydrogen sheet plasma using an omegatron mass spectrometer contained a function of an ion energy analyzer-Reference-Cited by-同舟云学术

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Measurement of the negative ions temperature in the hydrogen sheet plasma using an omegatron mass spectrometer contained a function of an ion energy analyzer

Published:2016 Issue:0 Volume:28 Page:n/a
ISSN:0915-5651
Container-title:Journal of Advanced Science
language:en
Short-container-title:Journal of Advanced Science

Author:

TAKIMOTO Toshikio¹,IIJIMA Takaaki¹,TANAKA Yuta¹,TONEGAWA Akira¹,KAWAMURA Kazutaka¹,SATO Kohnosuke²

Affiliation:

1. Department of Physics, School of Science, Tokai University

2. Chubu Electric Power Co., lnc.

Publisher

Society of Advanced Science

Subject

General Medicine

Link

https://www.jstage.jst.go.jp/article/jsas/28/0/28_11009/_pdf

Reference14 articles.

1. M. Bacal, G. W. Hamilton, A. M. Bruneteau, H. J. Doucet and J. Taillet: Rev. Sci. Instrum., 50, 719 (1979).

2. P. Devynck, J. Auvray, M. Bacal, P. Berlemont, J. Bruneteau, R. Leroy and R. A. Stern: Rev. Sci. Instrum., 60, 2873 (1989).

3. E. M. Hollmann, G. Antar, R. P. Doerner and S. C. Luckhardt: Rev. Sci. Instrum., 72, 623 (2001).

4. A. Tonegawa, K. Kumita, M. Ono, T. Shibuya and K. Kawamura: Jpn. J. Appl. Phys., 45, 8212 (2006).

5. H. Yazawa, A. Tonegawa, M. Ono, T. Shibuya and K. Kawamura: Jpn. J. Appl. Phys., 45, 8208 (2006).

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1. Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas;Journal of Vacuum Science & Technology B;2024-07-01

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