Computational model for the nonlinear dynamic response of MEMS-based micromirror

Abstract

In this study, it is aimed to perform Finite Element Analysis (FEA) of micromirror based on Micro-Electro-Mechanical Systems (MEMS) and to examine the nonlinear and dynamic responses of this system. Micromirror devices are indispensable, especially for optical systems and form the basis of them. In this work, dynamic and nonlinear responses of micromirror with 4 symmetric arms and one reflective surface were investigated. During the design and modeling, it is assumed that the upper and lower layers of the reflective surface have equal tensile and compressive stresses. The analysis of the system was obtained by applying a force of up to 30 GPa Prestressed on the reflective surface. The design and FEA of the micromirror system were made with the Comsol Multiphysics program. The nonlinear response of the analysis was carried out with the MATLAB program. This model, which has the most basic design of micromirror structures used in optical systems, is thought to be a source for a good examination of the nonlinear dynamic model and for understanding more complex structures.