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2. Controlling contamination: the origins of clean room technology
3. ISO 14644-6, (2007), Cleanrooms and associated controlled environments Part 6: Vocabulary.
4. You, H.-S., Wang, T.-C., Chang, W.-Y., Lai, C.-W., Lee, M.-W., Zuo, K.-w., (2004), Unified framework for facility condition monitoring, detection, and diagnostics, Proceedings of the Semiconductor Manufacturing Technology Workshop Proceedings, 41-46.
5. Temperature model of clean room manufacturing area for control analysis