Effect of Slurry Film Thickness Variation according to Spray Range Using Ultrasonic Spray Nozzle on Material Removal Rate-Reference-Cited by-同舟云学术

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Effect of Slurry Film Thickness Variation according to Spray Range Using Ultrasonic Spray Nozzle on Material Removal Rate

Published:2022-09-01 Issue:9 Volume:39 Page:675-682
ISSN:1225-9071
Container-title:Journal of the Korean Society for Precision Engineering
language:en
Short-container-title:KSPE

Author:

Heo Seongnyeong,Jeong Seonho,Kim Minji,Park Youngwook,Jeong Haedo^ORCID

Funder

Ebara Corporation

Publisher

Korean Society of Precision Engineering

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Safety, Risk, Reliability and Quality

Reference16 articles.

1. Marty W. D., (2017), State of CMP materials, The Dow Chemical Company, 1-14. https://nccavs-usergroups.avs.org/wp-content/uploads/CMPUG2017/CMP-717-4-DeGroot-Dow.pdf

2. CMC Critical Materials Council, CMP consumables US$2.9B in 2021 for IC Fabs. https://criticalmaterials.org/techcet-news/

3. Davis, S., (2017), Techcet CMP consumables 2015 market update, Techcet, 1-31. https://nccavs-usergroups.avs.org/wp-content/uploads/CMPUG2015/CMP2015_7_5Davis.pdf

4. Slurry components in metal chemical mechanical planarization (CMP) process: A review

5. Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

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