Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
Author:
Publisher
Zhejiang University Press
Subject
General Engineering
Link
http://link.springer.com/content/pdf/10.1631/jzus.C1200251.pdf
Reference25 articles.
1. Bao, M., Burrer, C., Esteve, J., Bausells, J., Marco, S., 1993. Etching front control of <110> strips for corner compensation. Sens. Actuat. A, 37-38:727–732. [doi:10.1016/0924-4247(93)80123-X]
2. Burns, D.W., Horning, R.D., Herb, W.R., Zook, J.D., Guckel, H., 1996. Sealed-cavity resonant microbeam accelerometer. Sens. Actuat. A, 53(1–3):249–255. [doi:10.1016/0924-4247(96)01135-1]
3. Burrer, C., Esteve, J., Lora-Tamayo, E., 1996. Resonant silicon accelerometers in bulk micromachining technology—an approach. J. Microelectromech. Syst., 5(2):122–130. [doi:10.1109/84.506200]
4. Chen, D., Wu, Z., Liu, L., Shi, X., Wang, J., 2009. An electromagnetically excited silicon nitride beam resonant accelerometer. Sensors, 9(3):1330–1338. [doi:10.3390/s90301330]
5. Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B., 2009. A New Two-Beam Differential Resonant Micro Accelerometer. IEEE Conf. on Sensors, p.158–163. [doi:10.1109/ICSENS.2009.5398209]
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