Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Author:

Xiong Ji-jun,Zheng Shi-jun,Hong Ying-ping,Li Jun,Wang Ying-lin,Wang Wei,Tan Qiu-lin

Publisher

Zhejiang University Press

Subject

General Engineering

Reference15 articles.

1. Birdsell, E., Allen, M.G., 2006. Wireless Chemical Sensors for High Temperature Environments. Solid-State Sensors, Actuatos, and Microsystems Workshop, p.212–215.

2. Birdsell, E., Park, J., Allen, M., 2004. Wireless Ceramic Sensors Operating in High Temperature Environments. 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conf. and Exhibit.

3. Birol, H., Maeder, T., Ryser, P., 2006. Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramic (LTCC). Sens. Actuat. A, 130–131:560–567. [doi:10.1016/j.sna.2005.12.009]

4. Chen, P., 2008. Implantable Wireless Intraocular Pressure Sensor. PhD Thesis, California Institute of Technology, p.6–27.

5. Chen, P.J., Rodger, D.C., Saati, S., Humayun, M.S., Tai, Y.C., 2008. Microfabricated implantable parylene-based wireless passive intraocular pressure sensors. J. Microelectromech. Syst., 17(6):1342–1351. [doi:10.1109/JMEMS.2008.2004945]

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