Author:
Zheng Xu-dong,Jin Zhong-he,Wang Yue-lin,Lin Wei-jun,Zhou Xiao-qi
Publisher
Zhejiang University Press
Reference12 articles.
1. Boser, B.E., Howe, R.T., 1996. Surface micromachined accelerometers. IEEE J. Solid-State Circuits, 31(3):366–375. [doi:10.1109/4.494198]
2. Bustillo, J.M., Howe, R.T., Muller, R.S., 1998. Surface micromachining for microelectromechanical systems. Proc. IEEE, 86(8):1552–1574. [doi:10.1109/5.704260]
3. Chae, J., Kulah, H., Najafi, K., 2004. An in-plane high-sensitivity, low-noise micro-g silicon accelerometer with CMOS readout circuitry. J. Microelectromech. Syst., 13(4):628–635. [doi:10.1109/JMEMS.2004.832653]
4. Chen, Y., Jiao, J., Dong, L., Xiong, B., Che, L., Li, X., Wang, Y., 2003. Micromachined bar-structure gyroscope with high Q-factors for both driving and sensing mode at atmospheric pressure. Sensors, Proc. IEEE, 1:461–465. [doi:10.1109/ICSENS.2003.1278980]
5. Cho, Y.H., Pisano, A.P., Howe, R.T., 1994. Visous damping model for laterally oscillating microstructures. J. Microelectromech. Syst., 3(2):81–87. [doi:10.1109/84.294325]
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