Novel serpentine structure design method considering confidence level and estimation precision

Author:

Chen Li-sheng,Luo Xiao-hua,Zhu Jiao-jiao,Jie Fan-chao,Yan Xiao-lang

Publisher

Zhejiang University Press

Subject

General Engineering

Reference28 articles.

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3. Chen, F., Shinosky, M., Li, B., Aitken, J., Cohen, S., Bonilla, G., Simon, A., McLaughlin, P., Achanta, R., Baumann, F., et al., 2011. Invasion Percolation Model for Abnormal TDDB Characteristic of ULK Dielectrics with Cu Interconnect at Advanced Technology Nodes. IEEE Int. Conf. on Reliability Physics Symp., p.2F.2.1–2F.2.8. [doi:10.1109/irps.2011.5784466]

4. Fayolle, M., Gayet, P., Morand, Y., 2000. Multilevel Test Structures for Metal CMP Integration Application to Cu/SiO2 Damascene Interconnect. 3rd Annual Int. Interconnect Technology Conf., p.28–30. [doi:10.1109/ iitc.2000.854271]

5. Gert, D.C., Enrique, M., 2008. Weak and strong laws of large numbers for coherent lower previsions. J. Stat. Plan. Inf., 138(8):2409–2432. [doi:10.1016/j.jspi.2007.10.020]

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