Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Published:2014-08-15
Issue:90
Volume:
Page:
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ISSN:1940-087X
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Container-title:Journal of Visualized Experiments
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language:en
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Short-container-title:JoVE
Author:
Small Joshua,Fruehling Adam,Garg Anurag,Liu Xiaoguang,Peroulis Dimitrios
Publisher
MyJove Corporation
Subject
General Immunology and Microbiology,General Biochemistry, Genetics and Molecular Biology,General Chemical Engineering,General Neuroscience