Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
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Published:2020-07-17
Issue:161
Volume:
Page:
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ISSN:1940-087X
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Container-title:Journal of Visualized Experiments
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language:en
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Short-container-title:JoVE
Author:
Yako Motoki,Ishikawa Yasuhiko,Abe Eiji,Wada Kazumi
Publisher
MyJove Corporation
Subject
General Immunology and Microbiology,General Biochemistry, Genetics and Molecular Biology,General Chemical Engineering,General Neuroscience