Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
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Published:2017-02-12
Issue:120
Volume:
Page:
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ISSN:1940-087X
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Container-title:Journal of Visualized Experiments
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language:en
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Short-container-title:JoVE
Author:
Rananavare Shankar B.,Morakinyo Moshood K.
Publisher
MyJove Corporation
Subject
General Immunology and Microbiology,General Biochemistry, Genetics and Molecular Biology,General Chemical Engineering,General Neuroscience